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  25 Mar 2026

  SK Hynix purchases $8bn EUV lithography scanner from ASML

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  26 Feb 2026

  ASML to deliver lithography machine featuring 1,000W light source by 2030, improving chip yield by 50%

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  04 Jul 2025

  Xanadu and Mitsubishi Chemical to develop quantum algorithms for EUV lithography

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  07 Aug 2024

  Japanese scientists develop cheaper and more energy efficient EUV lithography technology

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  22 May 2024

  ASML adds remote kill switch to TSMC’s EUV machines in case China invades Taiwan - report

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  05 Jan 2024

  Intel receives its High-NA EUV scanner from ASML

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  02 Jan 2024

  Dutch government revokes some ASML lithography export licenses, due to US pressure