Japanese scientists develop cheaper and more energy efficient EUV lithography technology
Simplified method only requires two mirrors compared to traditional six
News - extreme ultraviolet lithography
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ASML adds remote kill switch to TSMC’s EUV machines in case China invades Taiwan - report
Company has been running simulations to assess risks of a hypothetical invasion
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Intel receives its High-NA EUV scanner from ASML
Intel first ordered the machine in 2018
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Dutch government revokes some ASML lithography export licenses, due to US pressure
An undisclosed number of Chinese customers have had their orders for lithography machines canceled