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  28 Jul 2026

  State-backed Chinese company developing DUV lithography tools for domestic chip companies – report

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  26 Feb 2026

  ASML to deliver lithography machine featuring 1,000W light source by 2030, improving chip yield by 50%

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  29 Oct 2025

  US startup Substrate raises $100m for development of lithography tools to challenge ASML

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  17 Apr 2024

  ASML net sales fell by 21.6 percent in Q1; company remains optimistic about 2024

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  11 Apr 2024

  Huawei wants to develop lithography machinery at new Shanghai chip R&D campus

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  22 Mar 2023

  Nvidia announces computational lithography tool cuLitho, is being used by chipmaker TSMC

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  30 Jan 2023

  Japan and the Netherlands ready to join US chip equipment blocks on China

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  07 Jul 2022

  US pressures the Netherlands to ban ASML from selling more chip tech to China