Oxford Instruments has partnered with the NYU Nanofabrication Cleanroom to install a PlasmaPro ASP atomic layer deposition (ALD) system at the facility, the first in the US to be used for superconducting quantum applications.

Developed by Oxford Instruments and first launched in 2023, the PlasmaPro ASP ALD system was designed to produce superconducting nitrides essential for quantum applications, with the company saying it offers deposition rates three times faster than alternatives.

Atomic Layer Deposition is an advanced deposition technique that allows for ultra-thin films of a few nanometers to be deposited in a precisely controlled way, with the usage of plasma allowing for improved film properties and a wide range of possible materials.

The acquisition was funded by the US Microelectronics Commons through the NORDTECH hub, with the system directly supporting the Lab-to-Fab initiative to strengthen microelectronics research prototyping and workforce development, launched in 2022 under the US CHIPS and Science Act.

Based in Brooklyn, New York, NYU Nanofabrication Cleanroom is the borough’s first academic cleanroom, dedicated to the development of superconducting quantum technologies, advanced semiconductor electronics, and next-generation quantum devices.

“As an academic prototyping facility within the NORDTECH Hub, NYU Nanofab’s role is to enable new materials and processes that bridge fundamental research and scalable manufacturing for quantum technologies,” said Davood Shahrjerdi, director of the NYU Nanofab. “Extending this flagship capability to next-generation quantum hardware is a natural progression, as it could enable new materials and device architectures. We are excited about establishing this capability in our Nanofab and are grateful to Oxford Instruments for partnering with us to bring this vision to fruition.”

Dr. Harriet van der Vliet, head of strategic R&D Markets at Oxford Instruments Plasma Technology, added: "We are delighted to further strengthen the capability of NYU's Nanofab, with the installation of the first PlasmaPro ASP ALD system for superconducting nitrides within the USA. This technology will enable the team at NYU to accelerate the development of advanced semiconductor and quantum devices. We are pleased to be strengthening our partnership with NYU and supporting the next generation of researchers."

Oxford Instruments was founded in 1959 as the first commercial spin-out from Oxford University. It designs and manufactures tools and systems for industry and research, and was the first company to develop MRI scanners.

In June 2025, the company sold its business unit responsible for making dilution fridges for supercooled quantum computers to Quantum Design for £60 million ($81m).